I have noticed that when I launch the CCleaner interface webcachev01.dat gets put back into the
c:\users\userid\appdata\local\microsoft\windows\webcache
directory. You can add webcachev01.dat as a file to be specially removed (options, include, file), and it will get removed again.
What made me look for this was that error in the windows 10 system log that says:
Unable to start a DCOM Server: {0358B920-0AC7-461F-98F4-58E32CD89148}. The error:
"2147942767"
Happened while starting this command:
C:\WINDOWS\system32\DllHost.exe /Processid:{3EB3C877-1F16-487C-9050-104DBC